Patent · US Active

Acceleration sensor

US8266962B2 · kind B2 · utility

2Cited by

12References

28Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Thoralf Kautzsch · Dresden, DE
Bernhard Winkler · Birkenfeld, DE
Dirk Meinhold · Dresden, DE
Ben Rosam · Dresden, DE
Bernd Foeste · Dresden, DE
Andreas Thamm · Dresden, DE
Boris Binder · Dresden, DE

Key dates

Filing date	Jan 28, 2009
Grant date	Sep 18, 2012
Priority date	—
Expiry date	Feb 3, 2030

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2201/0235
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A semiconductor device includes a semiconductor substrate and a semiconductor mass element configured to move in response to an applied acceleration. The mass element is defined by trenches etched into the semiconductor substrate and a cavity below the mass element. The semiconductor device includes a sensing element configured to sense movement of the mass element and a complementary metal-oxide-semiconductor (CMOS) circuit formed on the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.