Wafer center finding with a Kalman filter
US8270702B2 · kind B2 · utility
1Cited by
25References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 3, 2010 |
| Grant date | Sep 18, 2012 |
| Priority date | — |
| Expiry date | Sep 3, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/136
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.