Gasket with positioning feature for clamped monolithic showerhead electrode
US8272346B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2009 |
| Grant date | Sep 25, 2012 |
| Priority date | — |
| Expiry date | May 14, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4973
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing. The assembly includes an upper showerhead electrode which is mechanically attached to a backing plate by a series of spaced apart cam locks. A thermally and electrically conductive gasket with projections thereon is compressed between the showerhead electrode and the backing plate at a location three to four inches from the center of the showerhead electrode. A guard ring surrounds the backing plate and is movable to positions at which openings in the guard ring align with openings in the backing plate so that the cam locks can be rotated with a tool to release locking pins extending from the upper face of the electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.