Sandy Chao
11Patents
8h-index
23Co-inventors
68Inventor score
Filing activity: Sep 1, 1999 → Oct 10, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8419959B2 | Clamped monolithic showerhead electrode | Electricity | 457 | Active |
| US8272346B2 | Gasket with positioning feature for clamped monolithic showerhead electrode | Emerging Cross-Sectional Technologies | 166 | Active |
| US6299753A | Double pressure vessel chemical dispenser unit | Chemistry; Metallurgy | 50 | Expired |
| USD814488S1 | Display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool | General | 26 | Active |
| USD788134S1 | Mobile device display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool | General | 26 | Active |
| US7418978B2 | Methods and apparatus for providing fluid to a semiconductor device processing apparatus | Emerging Cross-Sectional Technologies | 13 | Expired |
| US6454927B1 | Apparatus and method for electro chemical deposition | Chemistry; Metallurgy | 13 | Expired |
| US8536071B2 | Gasket with positioning feature for clamped monolithic showerhead electrode | Emerging Cross-Sectional Technologies | 10 | Active |
| US8084375B2 | Hot edge ring with sloped upper surface | Electricity | 8 | Active |
| US6739958B2 | Carrier head with a vibration reduction feature for a chemical mechanical polishing system | Performing Operations; Transporting | 7 | Expired |
| US7005046B2 | Apparatus for electro chemical deposition | Chemistry; Metallurgy | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.