Inventor · Campbell, CA, US

Sandy Chao

11Patents
8h-index
23Co-inventors
68Inventor score

Filing activity: Sep 1, 1999 → Oct 10, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US8419959B2 Clamped monolithic showerhead electrode Electricity 457 Active
US8272346B2 Gasket with positioning feature for clamped monolithic showerhead electrode Emerging Cross-Sectional Technologies 166 Active
US6299753A Double pressure vessel chemical dispenser unit Chemistry; Metallurgy 50 Expired
USD814488S1 Display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool General 26 Active
USD788134S1 Mobile device display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool General 26 Active
US7418978B2 Methods and apparatus for providing fluid to a semiconductor device processing apparatus Emerging Cross-Sectional Technologies 13 Expired
US6454927B1 Apparatus and method for electro chemical deposition Chemistry; Metallurgy 13 Expired
US8536071B2 Gasket with positioning feature for clamped monolithic showerhead electrode Emerging Cross-Sectional Technologies 10 Active
US8084375B2 Hot edge ring with sloped upper surface Electricity 8 Active
US6739958B2 Carrier head with a vibration reduction feature for a chemical mechanical polishing system Performing Operations; Transporting 7 Expired
US7005046B2 Apparatus for electro chemical deposition Chemistry; Metallurgy 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.