Substrate transfer apparatus, substrate process system, and substrate transfer method
US8277163B2 · kind B2 · utility
4Cited by
8References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 26, 2007 |
| Grant date | Oct 2, 2012 |
| Priority date | — |
| Expiry date | Feb 1, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate transfer apparatus includes forks that are vertically spaced apart from each other with a predetermined distance. When the forks take out the substrates from the first substrate containing part, each of the forks lifts the substrate and supports the same by moving upward from a pre-loading position located below the substrate to be taken out by a predetermined unloading stroke amount. A value of the predetermined distance is set to be equal to the sum of the distance between the substrates contained in the first substrate containing part and the unloading stroke amount.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.