Substrate support for high throughput chemical treatment system
US8287688B2 · kind B2 · utility
4Cited by
36References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 31, 2008 |
| Grant date | Oct 16, 2012 |
| Priority date | — |
| Expiry date | Apr 27, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68742
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A high throughput chemical treatment system for processing a plurality of substrates is described. The chemical treatment system is configured to chemically treat a plurality of substrates in a dry, non-plasma environment. A substrate support in the chemical treatment system is configured to support a plurality of substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.