Substrate carrying device, substrate carrying method and computer-readable storage medium
US8292549B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 13, 2011 |
| Grant date | Oct 23, 2012 |
| Priority date | — |
| Expiry date | Jul 13, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G2249/04
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
The substrate carrying device includes a carrying passage forming member forming a carrying passage along which a substrate is carried, exhaust grooves extending parallel to the carrying passage in the upper surface of the carrying passage forming member, a plurality of pairs each of right and left carrying gas flow grooves formed in the upper surface of the carrying passage forming member, inclined to a substrate carrying direction so as to approach the exhaust grooves from the right-hand side and the left-hand side of the exhaust grooves, respectively, and having inner ends joined to the exhaust grooves, respectively, and gas spouting pores formed near outer ends of the carrying gas flow grooves to spout a gas for causing the substrate to float and for creating substrate carrying gas flows flowing from the outer ends of the carrying gas flow grooves toward the inner ends of the carrying gas flow grooves.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.