On-line chamber cleaning using dry ice blasting
US8292698B1 · kind B1 · utility
49Cited by
10References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 30, 2007 |
| Grant date | Oct 23, 2012 |
| Priority date | — |
| Expiry date | Sep 10, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/022
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An on-line method of cleaning contaminants from at least one interior surface in plasma chambers comprises blasting one or more interior surfaces of a plasma chamber with dry ice to remove contaminants from the one or more surfaces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.