Patent · US Active

Gap processing

US8293617B2 · kind B2 · utility

4Cited by

9References

26Claims

0Family size

Assignee

Micron Technology, Inc. · US

Inventors

Arthur J. McGinnis · Boise, US
Sachin V. Joshi · Boise, US
Chan Lim · Yongsan-gu, KR

Key dates

Filing date	Oct 27, 2011
Grant date	Oct 23, 2012
Priority date	—
Expiry date	Oct 27, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/0228
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Among various methods, devices, and apparatuses, a number of methods are provided for forming a gap between circuitry. One such method includes depositing a first oxide precursor material on at least two conductive lines having at least one gap between the at least two conductive lines, and forming a breadloaf configuration with the first oxide precursor material on a top of each of the at least two conductive lines that leaves a space between a closest approach of at least two adjacent breadloaf configurations. The method also includes depositing a second oxide precursor material over the first oxide precursor material, where depositing the second oxide precursor material results in closing the space between the closest approach of the at least two adjacent breadloaf configurations.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.