Heat treatment apparatus
US8295691B2 · kind B2 · utility
8Cited by
4References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 15, 2008 |
| Grant date | Oct 23, 2012 |
| Priority date | — |
| Expiry date | Aug 23, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67115
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a heat treatment apparatus, a substrate held by a holding part is irradiated with light emitted from halogen lamps to perform preheating thereon and irradiated with a flash of light emitted from flash lamps to perform flash heating thereon. Part of light which is emitted from the halogen lamps and goes toward the flash lamps passes through a window hole formed in a peripheral-light shielding member and enters the substrate held by the holding part, and its energy is used for the preheating on the substrate. On the other hand, the remaining light is blocked out by the peripheral-light shielding member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.