Tatsufumi Kusuda
35Patents
10h-index
18Co-inventors
72Inventor score
Filing activity: Aug 16, 1985 → Nov 10, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7062161B2 | Photoirradiation thermal processing apparatus and thermal processing susceptor employed therefor | Electricity | 452 | Expired |
| US6843202B2 | Thermal processing apparatus for substrate employing photoirradiation | Electricity | 376 | Expired |
| US6998580B2 | Thermal processing apparatus and thermal processing method | Electricity | 36 | Expired |
| US5568252A | Method and apparatus for measuring insulation film thickness of semiconductor wafer | Electricity | 26 | Expired |
| US4674860A | Image transfer device | Physics | 25 | Expired |
| US7255899B2 | Heat treatment apparatus and heat treatment method of substrate | Electricity | 23 | Expired |
| US6885815B2 | Thermal processing apparatus performing irradiating a substrate with light | Electricity | 22 | Expired |
| US6859616B2 | Apparatus for and method of heat treatment by light irradiation | Electricity | 20 | Expired |
| US7381928B2 | Thermal processing apparatus and thermal processing method | Electricity | 12 | Expired |
| US7091453B2 | Heat treatment apparatus by means of light irradiation | Mechanical Engineering; Lighting; Heating | 10 | Expired |
| US7327947B2 | Heat treating apparatus and method | Electricity | 10 | Expired |
| US8050546B2 | Heat treatment apparatus heating substrate by irradiation with light | Electricity | 9 | Active |
| US7072579B2 | Light irradiation type thermal processing apparatus and method of adjusting light irradiation intensity | Electricity | 8 | Expired |
| US8295691B2 | Heat treatment apparatus | Electricity | 8 | Active |
| US4723068A | Electric power control device in an automatic temperature adjusting apparatus | Physics | 8 | Expired |
| US8447177B2 | Heat treatment apparatus heating substrate by irradiation with light | Electricity | 7 | Active |
| US5635410A | Bias temperature treatment method | Electricity | 7 | Expired |
| US9180550B2 | Heat treatment apparatus for heating substrate by light irradiation | Performing Operations; Transporting | 7 | Active |
| US8624165B2 | Heat treatment apparatus for heating substrate by irradiating substrate with flashes of light | Electricity | 7 | Active |
| US7935913B2 | Apparatus and method for thermal processing of substrate | Electricity | 6 | Active |
| US7230709B2 | Measuring method and measuring apparatus of optical energy absorption ratio, and thermal processing apparatus | Electricity | 6 | Expired |
| US6037781A | Measurement of electrical characteristics of semiconductor wafer | Electricity | 6 | Expired |
| US6856762B2 | Light irradiation type thermal processing apparatus | Electricity | 3 | Expired |
| US8229290B2 | Heat treatment apparatus and method for heating substrate by irradiation thereof with light | Mechanical Engineering; Lighting; Heating | 3 | Active |
| US9920993B2 | Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.