In-line characterization of a device under test
US8299809B2 · kind B2 · utility
1Cited by
11References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2009 |
| Grant date | Oct 30, 2012 |
| Priority date | — |
| Expiry date | Mar 8, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2875
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus is provided and includes a thermally isolated device under test to which first and second voltages are sequentially applied, a local heating element to impart first and second temperatures to the device under test substantially simultaneously while the first and second voltages are sequentially applied, respectively and a temperature-sensing unit to measure the temperature of the device under test.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.