Advanced platform for processing crystalline silicon solar cells
US8309374B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 7, 2009 |
| Grant date | Nov 13, 2012 |
| Priority date | — |
| Expiry date | Jul 25, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention generally provides a batch substrate processing system, or cluster tool, for in-situ processing of a film stack used to form regions of a solar cell device. In one configuration, the film stack formed on each of the substrates in the batch contains one or more silicon-containing layers and one or more metal layers that are deposited and further processed within the various chambers contained in the substrate processing system. In one embodiment, a batch of solar cell substrates is simultaneously transferred in a vacuum or inert environment to prevent contamination from affecting the solar cell formation process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.