Semiconductor package structure and manufacturing process thereof
US8310063B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 19, 2010 |
| Grant date | Nov 13, 2012 |
| Priority date | — |
| Expiry date | May 12, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/15311
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor package structure including a substrate, a first chip, a second chip, and an interposer is provided. The substrate has a carrying surface and an opposite bottom surface. The first chip disposed on the carrying surface has a first surface and an opposite second surface. The second surface faces the substrate. The first chip has a plurality of through silicon vias (TSVs) and a plurality of first pads and second pads on the first surface. The first pads are electrically connected to the corresponding TSVs. The TSVs are electrically connected to the substrate. The second chip disposed above the first chip exposes a portion of the first surface. The second chip is electrically connected to the corresponding TSVs. The interposer is disposed on the first surface. Top surfaces of the interposer and the second chip are substantially aligned with each other. The interposer is bonded to the second pads.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.