Planar coil and method of making the same
US8310328B2 · kind B2 · utility
1Cited by
15References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 7, 2010 |
| Grant date | Nov 13, 2012 |
| Priority date | — |
| Expiry date | Oct 21, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49146
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of making a planar coil is disclosed in the present invention. First, a substrate having a trench is provided. Then, a barrier and a seed layer are formed on the substrate in sequence. An isolative layer is used for guiding a conductive material to flow into a lower portion of the trench such that accumulation of the conductive material at opening of the trench is prevented before the lower portion of the trench is completely filled up, thereby avoiding gap formation in the trench.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.