Method and system for optical MEMS with flexible landing structures
US8314984B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 14, 2008 |
| Grant date | Nov 20, 2012 |
| Priority date | — |
| Expiry date | Jul 7, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49826
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical deflection device for a display application includes a semiconductor substrate comprising an upper surface region defining an upper surface plane. The optical deflection device also includes one or more electrode devices provided overlying the upper surface region and a hinge device including a silicon material and coupled to the upper surface region at a predetermined height above the upper surface plane. The optical deflection device further comprises a plurality of landing pads including a silicon material and coupled to the upper surface region at the predetermined height from the upper surface plane and a mirror structure. The mirror structure includes a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.