Liner-based liquid storage and dispensing systems with empty detection capability
US8322571B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2006 |
| Grant date | Dec 4, 2012 |
| Priority date | — |
| Expiry date | Jun 4, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/00164
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.