Patent · US Active

Wafer level surface passivation of stackable integrated circuit chips

US8324081B2 · kind B2 · utility

1Cited by
3References
9Claims
0Family size

Inventors

Key dates

Filing dateMar 4, 2011
Grant dateDec 4, 2012
Priority date
Expiry dateMar 4, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/1461
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An electrically insulative conformal coating is applied at least to the active (front) side and one or more sidewalls of the die during wafer processing. Also, a die has an electrically insulative conformal coating applied to at least the active (front) side and sidewalls. Also, assemblies include a stack of such die, electrically interconnected die-to-die; and assemblies include such a die or a stack of such die, electrically interconnected to underlying circuitry (for example in a substrate or a circuit board).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.