Patent · US Active

Method and system for correcting image changes

US8325323B2 · kind B2 · utility

1Cited by

7References

52Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Olaf Conradi · Sonthofen, DE
Toralf Gruner · Hennef (Sieg), DE

Key dates

Filing date	Jan 29, 2009
Grant date	Dec 4, 2012
Priority date	—
Expiry date	Apr 24, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70258
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The disclosure relates to a method for compensating image errors, generated by intensity distributions in optical systems, such as in projection lens arrays of microlithography systems, and to respective optical systems, such as projection lens arrays of microlithography systems.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.