Antireflective coating compositions
US8329387B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2008 |
| Grant date | Dec 11, 2012 |
| Priority date | — |
| Expiry date | Jul 8, 2028 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08G63/6854
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
The present invention relates to an antireflective coating composition comprising a novel polymer without an aromatic chromophore, where the polymer comprises a structural unit derived from an aminoplast and a structural unit derived from a diol, triol, dithiol, trithiol, other polyols, diacid, triacid, other polyacids, diimide or mixture thereof, where the diol, dithiol, triol, trithiol, diacid, triacid, diimide, diamide or imide-amide optionally contain one or more nitrogen and/or sulfur atoms or contain one or more alkene groups. The invention also relates to the novel polymer and a process for using the novel antireflective coating composition in a lithographic process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.