Method and apparatus for diagnosing status of parts in real time in plasma processing equipment
US8343305B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 4, 2007 |
| Grant date | Jan 1, 2013 |
| Priority date | — |
| Expiry date | Jun 13, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49004
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus and methods for diagnosing status of a consumable part of a plasma reaction chamber, the consumable part including at least one conductive element embedded therein. The method includes the steps of: coupling the conductive element to a power supply so that a bias potential relative to the ground is applied to the conductive element; exposing the consumable part to plasma erosion until the conductive element draws a current from the plasma upon exposure of the conductive element to the plasma; measuring the current; and evaluating a degree of erosion of the consumable part due to the plasma based on the measured current.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.