Roger Patrick
32Patents
13h-index
42Co-inventors
81Inventor score
Filing activity: Nov 18, 1987 → Jul 26, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6174450A | Methods and apparatus for controlling ion energy and plasma density in a plasma processing system | Electricity | 303 | Expired |
| US5401350A | Coil configurations for improved uniformity in inductively coupled plasma systems | Electricity | 268 | Expired |
| US5556549A | Power control and delivery in plasma processing equipment | Electricity | 154 | Expired |
| US5474648A | Uniform and repeatable plasma processing | Electricity | 148 | Expired |
| US4879257A | Planarization process | Emerging Cross-Sectional Technologies | 75 | Expired |
| US8221582B2 | Clamped monolithic showerhead electrode | Emerging Cross-Sectional Technologies | 56 | Active |
| US5468296A | Apparatus for igniting low pressure inductively coupled plasma | Electricity | 54 | Expired |
| US5532516A | Techniques for via formation and filling | Electricity | 54 | Expired |
| US5407524A | End-point detection in plasma etching by monitoring radio frequency matching network | Electricity | 47 | Expired |
| US5471091A | Techniques for via formation and filling | Emerging Cross-Sectional Technologies | 34 | Expired |
| US5639519A | Method for igniting low pressure inductively coupled plasma | Electricity | 23 | Expired |
| US5869877A | Methods and apparatus for detecting pattern dependent charging on a workpiece in a plasma processing system | Electricity | 21 | Expired |
| US5578165A | Coil configurations for improved uniformity in inductively coupled plasma systems | Electricity | 17 | Expired |
| US5217566A | Densifying and polishing glass layers | Electricity | 13 | Expired |
| US8216418B2 | Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-rings | Electricity | 11 | Active |
| US6309979A | Methods for reducing plasma-induced charging damage | Electricity | 11 | Expired |
| US7190119B2 | Methods and apparatus for optimizing a substrate in a plasma processing system | Electricity | 10 | Expired |
| US8414719B2 | Clamped monolithic showerhead electrode | Emerging Cross-Sectional Technologies | 9 | Active |
| US6062163A | Plasma initiating assembly | Electricity | 7 | Expired |
| US8796153B2 | Clamped monolithic showerhead electrode | Emerging Cross-Sectional Technologies | 7 | Active |
| US8152954B2 | Showerhead electrode assemblies and plasma processing chambers incorporating the same | Electricity | 6 | Active |
| US8470127B2 | Cam-locked showerhead electrode and assembly | Electricity | 6 | Active |
| US8343305B2 | Method and apparatus for diagnosing status of parts in real time in plasma processing equipment | Emerging Cross-Sectional Technologies | 5 | Active |
| US8187413B2 | Electrode assembly and plasma processing chamber utilizing thermally conductive gasket | Electricity | 5 | Active |
| US5904571A | Methods and apparatus for reducing charging during plasma processing | Electricity | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.