Patent · US Active

Probe station for on-wafer-measurement under EMI-shielding

US8344744B2 · kind B2 · utility

1Cited by

10References

9Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Axel Schmidt · Munich, DE
Botho Hirschfeld · Dresden, DE
Stojan Kanev · Sacka, DE
Andrej Rumiantsev · Dresden, DE
Michael Teich · Mannheim, DE

Key dates

Filing date	Jun 18, 2010
Grant date	Jan 1, 2013
Priority date	—
Expiry date	Feb 6, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/18
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An arrangement is provided for testing DUTs with a chuck that has a support surface for supporting of a DUT as well as for supplying the support surface with a defined potential, or for connecting the DUT. The arrangement further includes a positioning device for positioning the chuck as well as an electromagnetic shielding housing enclosing at least the chuck. Inside the housing and adjacent to the chuck, a signal preamplifier is arranged whose signal port facing the chuck is electrically connected with the support surface, wherein the signal preamplifier is moveable together with the chuck by the positioning device in a way that it holds its position constant relative to the chuck during positioning. The signal preamplifier is connected to a measurement unit outside of the housing via a measurement cable.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.