Charged particle beam detection unit with multi type detection subunits
US8350213B2 · kind B2 · utility
4Cited by
4References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 2, 2010 |
| Grant date | Jan 8, 2013 |
| Priority date | — |
| Expiry date | Jun 25, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24585
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A detection unit of a charged particle imaging system includes a multi type detection subunit in the charged particle imaging system, with the assistance of a Wien filter (also known as an E×B charged particle analyzer). The imaging system is suitable for a low beam current, high resolution mode and a high beam current, high throughput mode. The unit can be applied to a scanning electron inspection system as well as to other systems that use a charged particle beam as an observation tool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.