Molded differential PRT pressure sensor
US8359927B2 · kind B2 · utility
32Cited by
18References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 12, 2009 |
| Grant date | Jan 29, 2013 |
| Priority date | — |
| Expiry date | Sep 11, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus are described for fabricating an exposed differential pressure sensor (30) which protects interior electrical components (37) formed on a topside surface of a differential pressure sensor transducer die (31) from corrosive particles using a molding compound (39), but which vents both sides of a piezoresistive transducer sensor diaphragm (33) through a first vent hole (42) formed in an exposed die flag (36) and a second vent hole (38) formed in an exposed cap structure (33), enabling the sensor diaphragm (33) to sense differential pressure variations directly or indirectly through a protective gel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.