Patent · US Active

Nonvolatile semiconductor memory device

US8374033B2 · kind B2 · utility

190Cited by
9References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 22, 2010
Grant dateFeb 12, 2013
Priority date
Expiry dateFeb 5, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10B43/27
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A nonvolatile semiconductor memory device includes: a memory unit; and a control unit. The memory unit includes a multilayer structure including electrode films and inter-electrode insulating films alternately stacked in a first direction; a semiconductor pillar piercing the multilayer structure in the first direction; a memory layer provided between the semiconductor pillar and the electrode films; a inner insulating film provided between the memory layer and the semiconductor pillar; a outer insulating film provided between the memory layer and the electrode films; and a wiring electrically connected to the first semiconductor pillar. In erasing operation, the control unit sets the first wiring at a first potential and sets the electrode film at a second potential lower than the first potential, and then sets the first wiring at a third potential and sets the electrode film at a fourth potential higher than the third potential.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.