Method for examining a test sample using a scanning probe microscope, measurement system and a measuring probe system

US8381311B2 · kind B2 · utility

Assignee

• JPK INSTRUMENTS AG · DE

Inventor

• Torsten Jähnke · Berlin, DE

Key dates

• Filing date: May 16, 2008
• Grant date: Feb 19, 2013
• Expiry date: Aug 4, 2029

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q70/06
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a method and to a device for examining a test sample using a scanning probe microscope. According to the method a first and a second measurement using a scanning probe microscope are carried out on the test sample using a measuring probe system in which a measuring probe and another measuring probe are formed on a common measuring probe receptacle. During the first measurement, in relation to the test sample, the measuring probe is held in a first measurement position and the other measuring probe is held in another non-measurement position, and the test sample is examined with the measuring probe using a scanning probe microscope. After the first measurement, by displacing in relation to the test sample, the measuring probe is displaced from the measurement position into a non-measurement position and the other measuring probe from the other non-measurement position into another measurement position. During the second measurement, in relation to the test sample, the measuring probe is held in the non-measurement position and the other measuring probe is held in the other measurement position, and the test sample is examined with the other measuring probe u…