Patent · US Active

Method for inspecting a sample

US8389936B2 · kind B2 · utility

2Cited by

10References

13Claims

0Family size

Assignee

FEI Company · US

Inventors

Bert Henning Freitag · Eindhoven, NL
Georg Alexander Rosenthal · Kempen, DE
Daniel Woodrow Phifer, Jr. · Chelsea, US

Key dates

Filing date	Jul 9, 2010
Grant date	Mar 5, 2013
Priority date	—
Expiry date	Jan 27, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2008
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention describes a method for inspecting samples in an electron microscope. A sample carrier 500 shows electrodes 504, 507 connecting pads 505, 508 with areas A on which the sample is to be placed.After placing the sample on the sample carrier, a conductive pattern is deposited on the sample, so that voltages and currents can be applied to localized parts of the sample.Applying the pattern on the sample may be done with, for example, Beam Induced Deposition or ink-jet printing.The invention also teaches building electronic components, such as resistors, capacitors, inductors and active elements such as FET's in the sample.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.