Apparatus and method of adjusting a laser light source for an EUV source device
US8395133B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 16, 2009 |
| Grant date | Mar 12, 2013 |
| Priority date | — |
| Expiry date | Aug 3, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/2316
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An EUV light source device properly compensates the wave front of laser beam which is changed by heat. A wave front compensator and a sensor are provided in an amplification system which amplifies laser beam. The sensor detects and outputs changes in the angle (direction) of laser beam and the curvature of the wave front thereof. A wave front compensation controller outputs a signal to the wave front compensator based on the measurement results from the sensor. The wave front compensator corrects the wave front of the laser beam to a predetermined wave front according to an instruction from the wave front compensation controller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.