Patent · US Active

Thermal processing furnace and liner for the same

US8398773B2 · kind B2 · utility

448Cited by
10References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 21, 2011
Grant dateMar 19, 2013
Priority date—
Expiry dateMar 31, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/67109
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A thermal processing furnace, comprising:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.