Patent · US Active

Probe holder

US8402848B2 · kind B2 · utility

2Cited by

5References

7Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Joerg Kiesewetter · Sacka, DE
Stojan Kanev · Sacka, DE
Stefan Kreissig · Drebach, DE

Key dates

Filing date	Oct 10, 2008
Grant date	Mar 26, 2013
Priority date	—
Expiry date	Jul 27, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2887
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe holder has a manipulator, a probe arm arranged on the manipulator, and a probe needle that is at least indirectly connected to the probe arm. To increase the number of contacts of a substrate to be tested and to make it possible to test a plurality of contacts in etched trenches of semiconductor elements in a group of wafers, the probe arm is connected to a needle support on which the probe needle and at least one second probe needle are arranged.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.