Contrast for scanning confocal electron microscope
US8405027B2 · kind B2 · utility
5Cited by
10References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 14, 2011 |
| Grant date | Mar 26, 2013 |
| Priority date | — |
| Expiry date | Sep 26, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2802
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning confocal transmission electron microscope includes a descan deflector and a corrector below the sample. The microscope uses a detector that is preferably significantly larger than the resolution of the microscope and is positioned in the real image plane, which provides improved contrast, particularly for light elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.