Capacitor and manufacturing method thereof

US8410535B2 · kind B2 · utility

Assignee

• NANYA TECHNOLOGY CORPORATION · TW

Inventors

• Kuo-Hui Su · Taipei, TW
• Yi-Nan Chen · Taipei, TW
• Hsien-Wen Liu

Key dates

• Filing date: Apr 25, 2011
• Grant date: Apr 2, 2013
• Expiry date: Jun 15, 2031

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D1/696

Abstract

A capacitor and a manufacturing method thereof are provided. The capacitor includes a first electrode, a first metal layer, a dielectric layer and a second electrode. The first electrode is disposed on a substrate. The first metal layer is disposed on the first electrode. The dielectric layer is disposed on the first metal layer, wherein the material of the first metal layer does not react with the material of the dielectric layer. The second electrode is disposed on the dielectric layer.