Patent · US Active

Method for determination of residual errors

US8416412B2 · kind B2 · utility

3Cited by

17References

21Claims

0Family size

Assignee

Carl Zeiss SMS Ltd. · IL

Inventors

Uwe Schellhorn · Aalen, DE
Matthias Manger · Neukochen, DE

Key dates

Filing date	Oct 23, 2007
Grant date	Apr 9, 2013
Priority date	—
Expiry date	Oct 23, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70725
WIPO fieldOptics
WIPO sectorInstruments

Abstract

There is provided a method for determining residual errors, compromising the following steps: in a first step, a test plate comprising a first pattern is used, and in a second step, a test plate comprising a second pattern which is reflected and/or rotated with respect to the first step is used.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.