Uwe Schellhorn
9Patents
3h-index
21Co-inventors
53Inventor score
Filing activity: Aug 14, 2002 → Nov 14, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6816247B1 | Moiré method and a system for measuring the distortion of an optical imaging system | Physics | 15 | Expired |
| US7408652B2 | Device and method for the optical measurement of an optical system by using an immersion fluid | Physics | 7 | Expired |
| US7019824B2 | Moire method and measuring system for measuring the distortion of an optical imaging system | Physics | 4 | Expired |
| US8416412B2 | Method for determination of residual errors | Physics | 3 | Active |
| US7400388B2 | Method for determining distortion and/or image surface | Physics | 2 | Expired |
| US8473237B2 | Method for calibrating a specimen stage of a metrology system and metrology system comprising a specimen stage | Physics | 2 | Active |
| US8988752B2 | Beam control apparatus for an illumination beam and metrology system comprising an optical system containing such a beam control apparatus | Physics | 1 | Active |
| US7119910B1 | Phase shifting wavefront interference method | Physics | 1 | Expired |
| US8120763B2 | Device and method for the optical measurement of an optical system by using an immersion fluid | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.