Patent · US Active

Method for producing a micromechanical component having a filler layer and a masking layer

US8419957B2 · kind B2 · utility

0Cited by

2References

18Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Roland Scheuerer · Reutlingen, DE
Heribert Weber · Leverkusen, DE
Eckhard Graf · Gomaringen, DE

Key dates

Filing date	Apr 8, 2008
Grant date	Apr 16, 2013
Priority date	—
Expiry date	Dec 22, 2029

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2201/0197
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A method for producing a micromechanical component is proposed, a trench structure being substantially completely filled up by a first filler layer, and a first mask layer being applied on the first filler layer, on which in turn a second filler layer and a second mask layer are applied. A micromechanical component is also proposed, the first filler layer filling up the trench structure of the micromechanical component and at the same time forming a movable sensor structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.