Clamped monolithic showerhead electrode
US8419959B2 · kind B2 · utility
457Cited by
76References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 17, 2010 |
| Grant date | Apr 16, 2013 |
| Priority date | — |
| Expiry date | Oct 18, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32568
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing. The assembly includes an upper showerhead electrode which is mechanically attached to a backing plate by a series of spaced apart cam locks. A guard ring surrounds the backing plate and is movable to positions at which openings in the guard ring align with openings in the backing plate so that the cam locks can be rotated with a tool to release locking pins extending from the upper face of the showerhead electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.