Patent · US Active

Self-correcting optical elements for high-thermal-load optical systems

US8425060B2 · kind B2 · utility

2Cited by
3References
33Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 9, 2007
Grant dateApr 23, 2013
Priority date
Expiry dateApr 1, 2031

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/70958
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Mirrors and other optical elements are disclosed that include a body defining an optical surface (typically a reflective surface) and an opposing second surface. The body has a coefficient of thermal expansion (CTE). The optical element includes a correcting portion (e.g., a layer) attached to the second surface and having a CTE that, during heating of the optical element, imparts a bending moment to the body that at least partially offsets a change in curvature of the optical surface caused by heating. The body can be internally cooled. The body and correcting portion desirably are made of respective thermally conductive materials that can vary only slightly in CTE. The body desirably has a lower CTE than the correcting portion, and the correcting portion can be tuned according a variable property of the body and/or reflective surface. The body and correcting portion desirably function cooperatively in a thermally bimetallic-like manner.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.