Phase-shifting element and particle beam device having a phase-shifting element

US8436302B2 · kind B2 · utility

Assignees

• Carl Zeiss Microscopy GmbH · DE
• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Rasmus Schröder · Heidelberg, DE
• Bastian Barton · Frankfurt, DE
• Gerd Benner · Aalen, DE
• Harald Rose · Darmstadt, DE

Key dates

• Filing date: May 2, 2012
• Grant date: May 7, 2013
• Expiry date: May 2, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2809
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.