Method of creating reusable template for detachable thin film substrate
US8445314B2 · kind B2 · utility
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6Claims
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Key dates
| Filing date | May 24, 2010 |
| Grant date | May 21, 2013 |
| Priority date | — |
| Expiry date | Nov 4, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53265
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A structure and method operable to create a reusable template for detachable thin semiconductor substrates is provided. The template has a shape such that the 3-D shape is substantially retained after each substrate release. Prior art reusable templates may have a tendency to change shape after each subsequent reuse; the present disclosure aims to address this and other deficiencies from the prior art, therefore increasing the reuse life of the template.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.