Patent · US Active

Device and method for separating a substrate from a carrier substrate

US8449716B2 · kind B2 · utility

3Cited by

10References

7Claims

0Family size

Assignee

EV Group GmbH · AT

Inventors

Markus Wimplinger · Ried im Innkreis, AT
Friedrich Paul Lindner · Ried im Innkreis, AT

Key dates

Filing date	Mar 31, 2010
Grant date	May 28, 2013
Priority date	—
Expiry date	Mar 31, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T156/1972
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Device for separating a substrate from a carrier substrate which is connected to the substrate by an interconnect layer. The device includes a carrier substrate holder with a holding surface for holding the carrier substrate, and a substrate holder which is located opposite the carrier substrate holder with a substrate holding surface which can be located parallel to the holding surface for accommodating the substrate. There are separating means for parallel displacement of the substrate relative to the carrier substrate in the interconnected state of the substrate and carrier substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.