Patent · US Active

Particle beam systems and methods

US8450215B2 · kind B2 · utility

6Cited by

8References

20Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Hubert Mantz · Neu-Ulm, DE
Rainer Arnold · Obertshausen, DE
Michael Albiez · Aalen, DE

Key dates

Filing date	Aug 5, 2010
Grant date	May 28, 2013
Priority date	—
Expiry date	Jun 16, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2448
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An inspection method comprises

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.