Navigation and sample processing using an ion source containing both low-mass and high-mass species
US8455822B2 · kind B2 · utility
13Cited by
55References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 31, 2011 |
| Grant date | Jun 4, 2013 |
| Priority date | — |
| Expiry date | Oct 5, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An improved method and apparatus for imaging and milling a substrate using a FIB system. Preferred embodiments of the present invention use a mixture of light and heavy ions, focused to the same focal point by the same beam optics, to simultaneously mill the sample surface (primarily with the heavy ions) while the light ions penetrate deeper into the sample to allow the generation of images of subsurface features. Among other uses, preferred embodiments of the present invention provide improved methods of navigation and sample processing that can be used for various circuit edit applications, such as backside circuit edit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.