Mounting for deviation angle self compensating substantially achromatic retarder

US8462341B2 · kind B2 · utility

Assignee

• J.A. WOOLLAM CO., INC. · US

Inventors

• Ping He · Lincoln, US
• Blaine D. Johs · Lincoln, US
• Steven E. Green · Lincoln, US
• Craig M. Herzinger · Lincoln, US
• Duane E. Meyer · Lincoln, US
• Martin M. Liphardt · Lincoln, US

Key dates

• Filing date: Mar 14, 2011
• Grant date: Jun 11, 2013
• Expiry date: Aug 23, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/213
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.