Surface inspection tool and surface inspection method
US8462352B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 18, 2012 |
| Grant date | Jun 11, 2013 |
| Priority date | — |
| Expiry date | Apr 18, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface inspection tool 110 measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200. The surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.