Probe card analysis system and method
US8466703B2 · kind B2 · utility
0Cited by
20References
11Claims
0Family size
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Key dates
| Filing date | Aug 24, 2010 |
| Grant date | Jun 18, 2013 |
| Priority date | — |
| Expiry date | May 21, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2891
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for evaluating wafer test probe cards under real-world wafer test cell condition integrates wafer test cell components into the probe card inspection and analysis process. Disclosed embodiments may utilize existing and/or modified wafer test cell components such as, a head plate, a test head, a signal delivery system, and a manipulator to emulate wafer test cell dynamics during the probe card inspection and analysis process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.