Patent · US Active

Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the method

US8471202B2 · kind B2 · utility

0Cited by

6References

23Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Josef Biberger · Rottenburg a. d. Laaber, DE
Ralph Pulwey · Aalen, DE
Ernst Draszba · Wittislingen, DE
Klaus Hegele · Aalen, DE
Harald Niebel · Senden, DE
Andreas Adolf · Aalen, DE
Rainer Arnold · Obertshausen, DE

Key dates

Filing date	Dec 22, 2010
Grant date	Jun 25, 2013
Priority date	—
Expiry date	Dec 22, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/223
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method for producing a representation of an object using a particle beam, as well as a particle beam device for carrying out the method are disclosed. The system described herein is based on the object of specifying the method and the particle beam device for producing a representation of an object such that images which are produced, in particular including FFT images, are as free as possible of artifacts which are not caused by the object to be examined. This is achieved in particular in that pixel lives, line flyback times and pixel pause times are varied in raster patterns.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.