Patent · US Active

Particle-beam microscope

US8471203B2 · kind B2 · utility

3Cited by

10References

35Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Gerd Benner · Aalen, DE
Matthias Langer · Heubach, DE

Key dates

Filing date	Apr 8, 2010
Grant date	Jun 25, 2013
Priority date	—
Expiry date	Jul 6, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/28
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A particle beam microscope includes an illumination system generating a particle beam having a ring-shaped conical configuration. A selective detection system is configured to selectively detect one of two groups of particles having traversed the object region. The first group of particles includes the particles that traversed the object region un-scattered or scattered by a small scattering amount. The second group of particles includes particles scattered in the object region by a greater scattering amount.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.