Patent · US Active

Particle beam microscope

US8476589B2 · kind B2 · utility

3Cited by

3References

19Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Gerd Benner · Aalen, DE
Stefan Meyer · Langensendelbach, DE
Steffen Niederberger · Gerstetten, DE
Dirk Preikszas · Oberkochen, DE

Key dates

Filing date	Jun 29, 2012
Grant date	Jul 2, 2013
Priority date	—
Expiry date	Jun 29, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2802
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A particle beam microscope comprises a magnetic lens 3 having an optical axis 53 and a pole piece 21. An object 5 to be examined is mounted at a point of intersection 51 between an optical axis 53 and the object plane 19. First and second X-ray detectors 33 have first and second radiation-sensitive substrates 35 arranged such that a first elevation angle β1 between a first straight line 551 extending through the point of intersection 51 and a center of the first substrate 351 and the object plane 19 differs from a second elevation angle β2 between a second straight line 552 extending through the point of intersection 51 and a center of the second substrate 352 and the object plane 19 by more than 14°.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.