Patent · US Active

Method and device for examining a surface of an object

US8481933B2 · kind B2 · utility

2Cited by

6References

72Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Michael Albiez · Aalen, DE
Wolfram Buhler · Hermaringen, DE

Key dates

Filing date	Jul 14, 2009
Grant date	Jul 9, 2013
Priority date	—
Expiry date	Feb 7, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2809
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for treating a surface of an object and a device suitable in particular for performing this method provide for examining the surface of the object with the aid of a particle beam to counteract the charge buildup on the object. A gas is supplied to convey the charge away from the surface and/or to neutralize it.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.